激光微加工制作的微光纤珐-珀加速度传感器  

A Miniature Fiber-Optic Fabry-Perot Accelerometer Fabricated by Laser Micro-Machining

作　　者：俞晓婧[1] 冉曾令[1] 饶云江[1] 

机构地区：[1]电子科技大学宽带光纤传输和通信网技术教育部重点实验室,四川成都611731

出　　处：《光学与光电技术》2010年第5期13-15,共3页Optics & Optoelectronic Technology

基　　金：国家自然科学基金重点项目(60537040)资助项目

摘　　要：将157 nm激光微加工制作的微光纤珐-珀腔贴于悬臂梁结构构成加速度传感器。通过设计特定的悬臂梁结构和FFT方法,该加速度传感器的分辨率约为1.13 mg/Hz^(1/2)。通过采用MUSIC算法处理信号,信噪比可提高45 dB,系统分辨率约为3.56×10^(-2)/Hz^(1/2)。该微光纤珐-珀传感器具有可批量制作、成本低、抗高温、量程灵活等优点,有望应用于石油勘探、地震测量等领域中。A miniature Fabry-Perot cavity fabricated by 157 nm laser micro-processing mounted on a cantilever beam structure is used as an accelerometer. By using specific cantilever structure and FFT method, the resolution ratio of the F-P sen sor accelerometer is about 1.13 mg/Hz1/2. By adopting MUSIC algorithm, the signal to noise ratio of such a sensor system is increased 45 dB and the resolution ratio achieved is about 3. 56 ×10^-2μg/Hz1/2. The sensor can be mass produced with low cost, high-temperature-resistant, flexible range, and is anticipated to be used in the field of oil exploration, seismic surveying, etc.

关 键 词：光纤光学 传感器 激光微加工 光纤珐-珀腔 加速度计 MUSIC算法 

分 类 号：TN253[电子电信—物理电子学]