基于电活性高分子声表面波CO气体传感器研究  

Study on Surface Acoustic Wave CO Gas Sensor Based on Electroactive Polymers

作　　者：张朋[1] 陈明[1] 何鹏举[1] 马戎[1] 

机构地区：[1]西北工业大学自动化学院,陕西西安710072

出　　处：《压电与声光》2010年第5期709-712,716,共5页Piezoelectrics & Acoustooptics

摘　　要：为克服现有CO气体传感器精度低,工作温度高,成本高的缺点,对基于聚苯胺敏感膜的多层结构声表面波气体传感器进行了试验与理论研究,并推导了声表面波气体传感器的敏感作用公式。传感器采用声表面波双通道带延迟线的谐振器结构,将电活性高分子CO气体敏感材料(掺杂有In2O3的聚苯胺)覆盖在一条延迟线路上形成敏感膜(0.5～1.2μm)。将此声表面波CO气体传感器放在CO气体中在-40～+85℃范围内进行测试实验,实验结果显示,该声表面波CO传感器的敏感性好,敏感速度和恢复速度快,精度高。Surface acoustic wave （SAW） gas sensors based on PAn （polyaniline） thin film was studied experimentally and theoretically to overcome the shortcoming of low sensitivity,high working temperature and high cost of the traditional CO gas sensors.The sensitive quotation was also derived.The dual-path architecture was used to design the sensor.The In2O3-doping-polyaniline layers coated on one of the delay line had thickness from 0.5 m to1.2 m.The SAW CO gas sensor was tested over a range of operating temperatures between-40 ℃ and 85 ℃.Experimental result showed SAW CO gas sensor had the features of fast response and recovery time,good repeatability and high sensitivity.

关 键 词：声表面波CO气体传感器 电活性高分子 聚苯胺 多层结构声表面波器件 

分 类 号：TN722[电子电信—电路与系统]