多参数动态气体校准仪的设计与实现  

Design and realization of multi-parameter dynamic gas calibrator

作　　者：傅东旭[1] 施会华 朱峰[1] 王伟 王健[1,2] 

机构地区：[1]杭州电子科技大学电子信息学院,浙江杭州310018 [2]聚光科技(杭州)股份有限公司,浙江杭州310052

出　　处：《机电工程》2010年第10期43-46,50,共5页Journal of Mechanical & Electrical Engineering

摘　　要：为产生ppb～ppm级微量浓度的高精准校准气体,设计了MFC-2000多参数动态气体校准仪,采用了具有强大功能模块的嵌入式微处理器MC9S12XDT512,完成了气体校准仪的结构及软硬件设计,提出了将臭氧发生器及光度计嵌入在仪器内部,实现了高精度的各种浓度校准气体的产生。试验结果表明,该仪器运行稳定,可靠性好,可以产生100 ppb～6 ppm级的臭氧、二氧化硫等标准气体,并可将产生的臭氧标气直接与NO零气反应产生特定浓度的NO2标气,为监测仪器的校准提供了更为简便的手段。Aiming at producing standard gas with trace concentration in ppb～ppm level,using the embedded microprocessor MC9S12XDT512 with powerful functional nodules,the hardware and software of dynamic gas calibrator were developed.The design was improved for the ozone transmitter and photometer.Producing multiple kinds of regulating gases with high precise concentration was realized.The test results indicate that the instrument is stable,reliable.It can produce 100 ppb～6 ppm level standard ozone gas,and the gas can produce a certain NO2 concentration when mixes with Nitric oxide.It provides a more convenient way to calibration of monitoring equipment.

关 键 词：动态气体校准仪 标气 零气 

分 类 号：TH86[机械工程—仪器科学与技术] TP6[机械工程—精密仪器及机械]