低压气体流量标定技术研究  

Research on low pressure gas flow calibration technology

作　　者：徐波[1] 钱力[1] 黄刚[1] 

机构地区：[1]中国航天员科研训练中心,北京100094

出　　处：《传感器与微系统》2010年第8期63-65,共3页Transducer and Microsystem Technologies

摘　　要：热式质量流量传感器用于测量35～41 kPa(绝压)的气体流量,需在该工况下对其进行标定。采用文丘里喷嘴作为标准器,在被测流量传感器处构建调压系统,调节压力可至40±0.1 kPa(绝压),建立低压气体流量标准装置,通过比较流量传感器输出值与文丘里喷嘴标准流量,标定流量传感器。对常压下校准的喷嘴在35～41 kPa(绝压)条件下是否可以作为标准器进行了分析,试验证明:装置的稳定性为0.6%,重复性为0.13%,临界背压比为0.5,低压气体流量标定方法科学可行。The thermal mass flow sensor which is used to measure air flow under the absolute pressure of 35 - 41 kPa, should be calibrated. The Venturi nozzles is used as standard instrument, the system of gas pressure adjusting is built up, the gas pressure can be adjusted to absolute pressure of 40 -0.1 kPa, so the system of low gas flow measuring standard device is founded, the flow sensor is calibrated by comparing the output value of sensor to the standard flow of Venturi nozzles. Whether the critical Venturi nozzles can be used as calibrating facility or not have been analyzed and tested. From the results of experiments, it is concluded that the stability of the facility is 0.6 %, the repeatability is 0.6 % , the critical pressure ratio is 0.5, the means of low gas pressure flow calibration is feasible.

关 键 词：航天器 计量学 流量传感器 标定 文丘里喷嘴 

分 类 号：TP212[自动化与计算机技术—检测技术与自动化装置] TB937[自动化与计算机技术—控制科学与工程]