内腔室结构对氧气传感器的性能影响研究  

Research on influence of inner chamber structure on function of oxygen sensor

作　　者：程迎国[1] 周明军[1] 郝玉芳[1] 朱保峰[1] 刘智敏[1] 

机构地区：[1]中国电子科技集团公司第四十九研究所,黑龙江哈尔滨150001

出　　处：《传感器与微系统》2010年第10期9-10,共2页Transducer and Microsystem Technologies

摘　　要：介绍了一种制作陶瓷内腔室的工艺方法,该方法可以应用于制作氧化锆氧气传感器内部的气体腔室,包含极限电流氧气传感器、分压型氧气传感器等,并可以对腔室体积自由控制,屏弃了传统方法利用玻璃封接来实现的工艺步骤。以极限电流氧气传感器为例,研究了内腔室结构对传感器的性能影响,对提高氧气传感器的响应时间和可靠性具有指导意义。A special technology which was used to make ceramic inner chamber of zirconia oxygen sensor such as limiting current type oxygen sensor and partial pressure type oxygen sensor was studied. This technology could control the volume of chamber freely. It abandoned traditional glass sealing process. The effect of inner chamber structure on property of limiting current type of oxygen sensor was also discussed. Generally speaking, the technology was very important to improve the response time and reliability of limiting current type of oxygen

关 键 词：氧气传感器 极限电流 气体内腔室 

分 类 号：TP212.2[自动化与计算机技术—检测技术与自动化装置]