飞秒激光对P型碲镉汞打孔的形貌和PN结特性研究  

THE MORPHOLOGY OF MICRO HOLE PN JUNCTION IN P-TYPE HgCdTe FORMED BY FEMTOSECOND LASER DRILLING

作　　者：周松敏[1] 查访星[1] 郭青天[1] 殷菲[2] 李茂森[1] 马洪良[1] 张波[2] 

机构地区：[1]上海大学理学院物理系,上海200444 [2]中国科学院上海技术物理研究所,上海200083

出　　处：《红外与毫米波学报》2010年第5期337-341,共5页Journal of Infrared and Millimeter Waves

基　　金：上海市重点学科建设无线电物理专项基金(S30105)

摘　　要：激光束诱导电流(LBIC)检测实验表明,飞秒激光刻蚀P型碲镉汞形成的孔洞结构具有PN结特性.实验研究了激光刻蚀功率、激光聚焦透镜数值孔径等参数对刻蚀孔形貌的影响,发现在较低的激光功率范围内,孔径与激光功率基本呈线性关系.刻蚀孔反型层的厚度也与激光功率基本呈线性关系,但不同激光功率刻蚀所形成孔结构的LBIC信号强度的改变不大.另外,还研究了刻蚀激光在材料中聚焦深度对刻蚀孔LBIC信号的影响,发现该因素的影响并不明显.The laser beam induce current（LBIC） characterization on femtosecond laser drilled holes indicates the formation of pn junctions in p-HgCdTe.The influences of laser power and numerical values of focus lens on the morphology of the drilled holes were studied.The diameter of the holes and their inversion layer thickness are both linearly proportional to the power of laser.On the other hand,there were no observable changes in the LBIC signals of the holes as the laser power was changed.In addition,the LBIC signal intensity of the holes was insensitive to the change of focus depth of the drilling laser.

关 键 词：碲镉汞 PN结 激光束诱导电流 飞秒激光打孔 

分 类 号：TN215[电子电信—物理电子学]