溶胶-凝胶法在玻璃表面涂膜  

Preparation of Sol-Gel Thin Films on Glass Surface

作　　者：蒋洋[1] 肖光华[1] 梁开明[1] 

机构地区：[1]清华大学材料科学与工程系,北京100084

出　　处：《材料导报》1999年第4期28-31,共4页Materials Reports

摘　　要：利用溶胶-凝胶法以浸涂方式在玻璃基体上制备了SiO_2薄膜,研究了某些工艺参数,尤其是加水量R(水与正硅酸乙酯的摩尔比)对薄膜形成过程及薄膜质量的影响,用SEM观察了不同薄膜的微观结构,并结合SiO_2的溶胶-凝胶过程中聚合物的结构及涂膜特性进行了讨论。结果表明,在R<2或R>20时,并且添加适量添加剂的溶胶,能够制得结构均匀而不开裂的SiO_2薄膜。The silica thin films were deposited on microscope slides by the sol-gel technique, using dip coating method. The sols were prepared by diluting tetraethylorthosilicate(TEOS) in ethanol and water, using different molar ratios, R, of H_2O: TEOS and different catalysts. The effect of the water/TEOS molar ratio (R) and some other factors on the structure and properties of silica thin films is discussed in this paper. The surface properties were studied by SEM and the process of polymerization was studied by DTA analysis. It was found that the structure of the films and the process of polymerization changes with different R. For R(2 or R)20, with the proper additions, silica thin films with high quality can be derived by dip coating method.

关 键 词：溶胶-凝胶法 薄膜 玻璃基体 正硅酸乙酯 

分 类 号：O484.1[理学—固体物理]