开管退火对碲锌镉单晶片沉积相影响的研究  

Research on the Effects of the Precipitates in CdZnTe Wafer by Open-tube Annealing Method

作　　者：万锐敏[1] 黄晖[1] 陈雪梅[1] 龚晓霞[1] 胡赞东[1] 姬荣斌[1] 

机构地区：[1]昆明物理研究所,云南昆明650223

出　　处：《红外技术》2010年第10期579-582,共4页Infrared Technology

基　　金：云南省自然科学基金重点项目;编号:2003E0012Z;云南省科技创新人才计划资助项目;编号:2005PY02-7

摘　　要：报道了一种CZT单晶片退火的新装置和新工艺,可以方便有效的对CZT单晶片进行开管退火。主要研究了氢气氛下加Cd源开管退火对CZT晶片中沉积相的影响。研究发现:经过开管退火处理后CZT晶片中的沉积相颗粒的密度和尺寸都明显减小,有效消除了Te沉积相,大颗粒的Cd沉积相尺寸也明显减小。The effects on the precipitates of the CZT wafer have been intensively investigated in the hydrogen atmosphere by injecting Cd source.The experiments indicate that the size and density of precipitates in deposition phase are reduced apparently,the Te precipitates are also been eliminated mostly,the large size of Cd precipitate have a obvious reduction in size.

关 键 词：碲锌镉单晶片 沉积相 开管退火 Cd源 氢气氛 

分 类 号：O781[理学—晶体学]