基于组合薄膜制备技术的成分梯度薄膜(La_(1-x)Ca_x)VO_3(0≤x≤1)的制备和热电性能研究  

The Study on Thermoelectric Properties of (La_(1-x)Ca_x)VO_3(0≤x≤1) Films by Combinatorial Pulsed Laser Deposition

作　　者：王群骄[1] 张毅斌[2] 

机构地区：[1]东北大学EPM重点实验室,辽宁沈阳110004 [2]中国人民解放军驻鞍山钢铁集团公司军事代表处,辽宁鞍山114000

出　　处：《材料开发与应用》2010年第5期64-68,共5页Development and Application of Materials

基　　金：国家自然基金(No.50674033);博士后基金(No.2005037230)

摘　　要：采用"组合激光溅射制膜技术",制备了高质量(La1-xCax)VO3(0≤x≤1)成分梯度薄膜。采用组合热电测量系统和组合XRD系统测量了(La1-xCax)VO3(0≤x≤1)成分梯度薄膜的热电性能和晶体结构。在0≤x≤1范围内,(La1-xCax)VO3形成了固溶体。800℃生长的LaVO3薄膜具有最大的功率因数(α)值0.6μW/cm K2。V离子化学价对LaVO3的热电性能影响很大,当它由+3向+2变化时,可能获得良好的热电性能。La1-xCaxVO3 composition-spread films were fabricated by combinatorial pulsed laser deposition and their thermoelectric properties were evaluated paralelly by the multi-channel thermoelectric measurement system.Concurrent X-ray analysis verified the formation of solid soluted films in the full composition range（0≤x≤1） as judged from the linear variation of the lattice constants.The power coefficient of 0.6 μW/cm K2 was achieved in LaVO3 film at 800℃.Large TE properties in vanadium oxide system can be expected with the change of vanadium ion valence from 3＋ to 2＋.

关 键 词：成分梯度薄膜 热电 钒氧化物 组合激光溅射沉积技术 

分 类 号：TG156.99[金属学及工艺—热处理] TG115[金属学及工艺—金属学]