溶胶-凝胶法制备Mg掺杂ZnO薄膜的微结构与光学性质  

Microstructue and Optical Properties of Mg-doped ZnO Thin Films Prepared by Sol-gel Method

作　　者：黄凯[1] 吕建国[2] 刘先松[3] 唐震[1] 

机构地区：[1]安徽建筑工业学院数理系,合肥230601 [2]合肥师范学院物理与电子工程系,合肥230601 [3]安徽大学物理与材料科学学院,合肥230039

出　　处：《人工晶体学报》2010年第5期1171-1175,共5页Journal of Synthetic Crystals

基　　金：国家自然科学基金(No.50672001);安徽省高等学校省级自然科学研究重点项目(KJ2010A284)

摘　　要：采用溶胶-凝胶技术在Si(111)和石英玻璃衬底上制备了Mg掺杂ZnO薄膜。用X射线衍射仪(XRD)、原子力显微镜(AFM)、扫描电镜(SEM)和紫外-可见(UV-Vis)分光光度计测试薄膜的微结构、表面形貌和光学性质。结果表明:所得Mg掺杂ZnO薄膜仍为六角纤锌矿型结构,呈c轴方向择优生长,随着退火温度升高,薄膜的晶格常数c由0.5288 nm减小到0.5278 nm,粗糙度从3.8 nm增大到6.5 nm,光学带隙由3.26 eV增大到3.31 eV。Mg-doped ZnO thin films were prepared by sol-gel method on Si（111） and quartz glass substrates.The microstructure,morphology,and photoluminescence of the Mg-doped ZnO thin films were studied by X-ray diffraction,atomic force microscopy,scanning electron microscopy,and fluorescence spectrophotometer.The results indicated that the Mg-doped ZnO thin films are polycrystalline with hexagonal wurtzite structure and a higher preferential c-axis orientation.As the annealing temperature increasing,the lattice constant cdecreases from 0.5288 nm to 0.5278 nm,the root mean square increases from 3.8 nm to 6.5 nm,and the band gap increases from 3.26 eV to 3.31 eV.

关 键 词：Mg掺杂ZnO薄膜 溶胶-凝胶法 微结构 光学性质 

分 类 号：O484[理学—固体物理]