Design of integrated microlens for collimation of the vertical-cavity surface emitting laser array  

作　　者：胡永生 叶淑娟 王贞福 秦莉 宁永强 

机构地区：[1]Changchun Institute of Optics,Fine Mechanics and Physics,Chinese Academy of Sciences [2]Graduate University,Chinese Academy of Sciences

出　　处：《Optoelectronics Letters》2010年第6期421-425,共5页光电子快报（英文版）

基　　金：supported by the National Natural Science Foundation of China (Nos. 90923037 and 60636020)

摘　　要：A method based on the theory of transfer matrix to design the integrated microlens for the collimation of vertical-cavity surface emitting laser(VCSEL) array is presented.The integrated microlenses fabricated on the substrate directly and on a certain polymer material which is on the substrate are considered.The relationships between the radius of curvature,beam waist and the divergence angle after collimation are obtained with the help of ZEMAX.The results show that the devices with the divergence angle of 15°(1/e2) and beam waist of 2 μm can be improved to those with the divergence angle lower than 1°,and the devices with beam waist of 10 μm can be improved to those with the divergence angle lower than 3°,which is a good reference for manufacturing high-power devices with small divergence angle.The conclusions including increasing the thicknesses of both the substrate and polymer material and reducing the diameter of oxidized layer are drawn,which will be an important guidance for experiment research.A method based on the theory of transfer matrix to design the integrated microlens for the collimation of vertical-cavity surface emitting laser（VCSEL） array is presented.The integrated microlenses fabricated on the substrate directly and on a certain polymer material which is on the substrate are considered.The relationships between the radius of curvature,beam waist and the divergence angle after collimation are obtained with the help of ZEMAX.The results show that the devices with the divergence angle of 15°（1/e2） and beam waist of 2 μm can be improved to those with the divergence angle lower than 1°,and the devices with beam waist of 10 μm can be improved to those with the divergence angle lower than 3°,which is a good reference for manufacturing high-power devices with small divergence angle.The conclusions including increasing the thicknesses of both the substrate and polymer material and reducing the diameter of oxidized layer are drawn,which will be an important guidance for experiment research.

关 键 词：垂直腔表面发射激光器 激光器阵列 透镜设计 集成 瞄准 准直透镜 VCSEL 高分子材料 

分 类 号：TN248[电子电信—物理电子学] TN248.4