一种基于标准CMOS工艺的单片光互连  

A monolithic optical interconnection based on the standard CMOS process

作　　者：肖新东[1] 毛陆虹[1] 余长亮[1] 谢生[1] 张世林[1] 

机构地区：[1]天津大学电子信息工程学院,天津300072

出　　处：《光电子．激光》2010年第11期1631-1634,共4页Journal of Optoelectronics·Laser

基　　金：国家"863"基金资助项目(2009AA03Z415);教育部博士点新教师基金资助项目(200800561121)

摘　　要：探索了采用标准CMOS工艺实现单片光互连的可行性。采用特许(Chartered)半导体公司3.3V、0.35μm标准模拟CMOS工艺设计并制造了一种单片光互连系统,并用两种结构研究了衬底噪声耦合对互连性能的影响。测试结果表明:该光互连系统可工作于几×103Hz,验证了基于标准CMOS工艺的单片光互连系统是可行的。The feasibility of a monolithic optical interconnection in tge standard CMOS process is discussed in this paper.An optical interconnection system is designed and implemented in a Chartered 3.3 V,0.35 μm standard analog CMOS process with two schemes for the research of the substrate noise coupling effect on the optical interconnection performance.The test results show that the optical interconnection system can work at several kilohertz, and the feasibility of the standard CMOS based optical interconnection system is proved in this paper.

关 键 词：光互连 标准CMOS 发光器 光波导 

分 类 号：TN432[电子电信—微电子学与固体电子学] TN850