一种新型薄膜压磁电感式压力传感器的研究  

Study on a New Electromagnetic Film Pressure Sensor Based on the Magnetoelasticity Effect

作　　者：石延平[1,2] 倪立学[1] 周庆贵[1] 

机构地区：[1]江苏淮海工学院机械系,江苏连云港222005 [2]江苏海洋资源开发研究院,江苏连云港222001

出　　处：《传感技术学报》2010年第9期1256-1260,共5页Chinese Journal of Sensors and Actuators

基　　金：江苏省教育厅自然基金资助项目(07KJD430014);江苏省海洋资源开发研究院科技开放基金项目资助(JSIMR09B07)

摘　　要：为提高压力传感器温度稳定性,对一种利用Fe基非晶态合金压磁效应的薄膜压力传感器进行了可行性研究。论述了这种传感器的结构、工作原理、输出特性以及主要参数的选择。通过负压标定试验,分析了传感器的静态特性以及温度对输出的影响。试验结果表明,设计的传感器最大静态误差为1.17%,最大灵敏度为0.7374mV/kPa,温度零点漂移为0.936%F.S/℃。另外,传感器结构简单,工作可靠,在低压力检测时,温度稳定性高。In order to enhance the temperature stability of the pressure sensor, a study on electromagnetic induction film pressure sensor on the magnetic effect of Fe-based amorphous alloy was made. Firstly, its operation principle, structure, output characteristic and the choice of some major parameter were discussed. Secondly, through the low-pressure experiment, the static characteristic as well as the temperature output of the influence were analyzed . The experimental result shows sensor designed in this paper the static error of maximum 1.17% and the maximum sensitivity of 0.7374 mv / kPa, the temperature zero drift of 0.936% FS /℃,and it have some characteristic such as reliability, simpler structure and higher temperature stability in low-pressure.

关 键 词：压力传感器 Fe基非晶态合金 压磁效应 低压试验 

分 类 号：TP212.1[自动化与计算机技术—检测技术与自动化装置]