光纤法布里珀罗氢气检测技术  

A Technique on Fabry-Perot Optical Fiber Hydrogen Measurement

作　　者：张毅[1] 庄志[1] 黎启胜[1] 张敏[2] 杨振[2] 廖延彪[2] 

机构地区：[1]中国工程物理研究院总体工程研究所,四川绵阳621900 [2]清华大学电子工程系光纤传感研究室,北京100084

出　　处：《传感技术学报》2010年第10期1386-1389,共4页Chinese Journal of Sensors and Actuators

基　　金：国家自然科学基金委员会-中国工程物理研究院联合基金资助项目(10776016)

摘　　要：实现对密闭容器内的微量氢气进行快速准确的测量,对提高产品的贮存安全性有重要意义,为此开展了一种具有实用性的新型光纤传感器研究。介绍了基于溅射钯银合金膜的非本征法布里-珀罗光纤氢气传感器系统的工作原理,通过应力传递过程的分析,建立了法布里-珀罗腔腔长变化与氢浓度关系的数学模型,并推导出传感器灵敏度计算方法。实验通过在一定浓度下研究该传感器的氢响应特性,证实了该氢气检测方法的可行性,并且其理论模型与实验结果吻合较好。In order to detect the small quantity of hydrogen in an airtight container fastly and accurately that is important to enhance the product reserve security,a new practical optical fiber hydrogen sensor was studied.The principle of the optical fiber hydrogen sensor based on the extrinsic Fabry-Perot interferometric（EFPI）by the use of palladium silver（Pd-Ag）film was introduced.The stress transfer model of the sensor was analyzed and the relationship between the variation of Fabry-Perot gap length and the hydrogen concentration was calculated,as well as the formula of sensor sensitivity was presented.The validity of this hydrogen detecting sensor has been experimentally proved by means of investigating the responsibility of the sensor in a function of the hydrogen concentration,with the analytical value was close to the experimental results.

关 键 词：光纤氢气传感器 气体检测 非本征法布里珀罗干涉仪 钯银合金膜 

分 类 号：TP212[自动化与计算机技术—检测技术与自动化装置] TN247[自动化与计算机技术—控制科学与工程]