氧化锌纳米棒/单晶硅的酒精传感器研究  

Studies of Alcohol Sensor Based on ZnO Nano-Rods/Single Crystal Si

作　　者：周小岩[1] 王文新[1] 张晶[1] 

机构地区：[1]中国石油大学(华东)物理科学与技术学院,山东东营257061

出　　处：《传感技术学报》2010年第10期1390-1393,共4页Chinese Journal of Sensors and Actuators

基　　金：山东省科技技术攻关计划项目资助(2009GG10006004)

摘　　要：首先采用射频溅射在单晶硅(Si)上制备氧化锌(ZnO)薄膜,作为生长ZnO纳米棒的晶种层,再在水热条件下生长ZnO纳米棒。X射线衍射、X射线能量色散谱,扫描电镜及室温光致发光谱对样品的物相结构、成分、表面微观形貌和晶体缺陷进行了表征。结果表明合成的ZnO纳米棒是六方纤锌矿结构,长径比较高,结晶良好。研究了ZnO纳米棒/单晶Si传感器在空气和酒精气体中的电压-电流(I-V)特性,阻抗谱及响应-恢复时间。该传感器在+6V的偏置电压下,其电阻在0.08g/L酒精气体中下降71%,响应时间小于1min,可以作为一种新型的酒精气体传感器。The ZnO thin films were prepared on single crystal silicon by the radio-frequency sputtering,and ZnO nano-rods were prepared on the ZnO films by hydrothermal method.The crystal structure,surface morphology,composition and crystal defects of the products were characterized by X-ray diffraction（XRD）,scanning electron microscopy（SEM）,energy dispersive analysis of X-ray（EDAX）and photoluminescence（PL）.It shows that ZnO nano-rods belong to the hexagonal wurtzite structure,have higher length-diameter and better crystallization.The paper studied the I-V characteristics,impedance and response-recovery time of ZnO nano-rods /single crystal Si sensor in air and alcohol gas.The resistance of ZnO nano-rods /single crystal Si sensor decreases by 71% in 0.08 g/L ethanol gas at ＋6 V bias voltage,and response time is less than 1 min.It can serve as a new type of alcohol gas sensor with high sensing property.

关 键 词：传感器 气敏 ZnO纳米棒/单晶Si 水热合成 

分 类 号：TP212.1[自动化与计算机技术—检测技术与自动化装置] TN304.92[自动化与计算机技术—控制科学与工程]