激光感应聚酰亚胺薄膜表面电镀金属的研究  

The Research of Electrical Plate on the Laser Induced PI Film

作　　者：赵刚[1,2] 张兵临 姚宁[1,2] 李运钧 马会中[1,2] 刘文清 龚知本[1,2] 

机构地区：[1]中国科学院安徽光学精密机械研究所 [2]郑州大学物理工程学院

出　　处：《光电子．激光》1999年第2期107-109,共3页Journal of Optoelectronics·Laser

基　　金：国家自然科学基金

摘　　要：本文介绍了用电镀的方法提高激光感应聚酰亚胺薄膜电导率的实验结果。实验证实，激光感应聚酰亚胺薄膜表面产生的物理和化学变化对金属镀膜的形成和镀层与衬底的结合性有积极的影响。文中讨论了在整个过程中一些电镀条件，如电流密度等对金属膜层的均匀性、晶粒的大小等性质所起的作用。实验证明电流密度越小，镀层越均匀，晶粒也越小。该实验将激光技术与电镀这一传统工艺相结合，从而提高了有机复合薄膜的电导率。这一结果有可能在微电子工业领域得到实际应用。In this paper,we report a electro deposition method to improve the conductivity of laser induced PI film.During the experiment,the PI was irradiated by UV laser.The Ni and other metal such as Cu were plated on the laser induced PI film with wide range of resistance (from 10K to 100K).The adhersion between metal film and the PI substrate was good enough to pass the “transparent tape test”.The conductivity of the film was increased to as same as that of metal.In this paper,we have also discussed the film was increased to as same as that of metal.In this paper,we have also discussed the electrical current parameter which effects the surface morpholygy and other characteristics of the metal film.

关 键 词：电镀 激光感应 聚酰亚胺 电导率 

分 类 号：TN24[电子电信—物理电子学] TQ153[化学工程—电化学工业]