Characterization of vanadyl phthalocyanine based surface-type capacitive humidity sensors  

作　　者：Fakhra Aziz M.H.Sayyad Khassan S.Karimov M.Saleem Zubair Ahmad S.Mahmood Khan 

机构地区：[1]Ghulam Ishaq Khan Institute of Engineering Sciences and Technology,Topi-23640,Pakistan [2]Low Dimensional Material Research Center,Department of Physics,University of Malaya,50603 Kuala Lumpur,Malaysia [3]Physical Technical Institute,Aini St-299/1,Dushanbe,734063,Tajikistan [4]Department of Mechanical Engineering,20 Symonds Street Auckland,University of Auckland,New Zealand

出　　处：《Journal of Semiconductors》2010年第11期9-14,共6页半导体学报（英文版）

摘　　要：This study presents the fabrication and characterization of novel surface-type capacitive humidity sensors using vanadyl phthalocyanine（VOPc） as the active material.The devices,which comprise three different thicknesses, have been fabricated using the thermal evaporation technique.A thin film of VOPc is deposited on thoroughly cleaned glass substrates with pre-patterned Ag electrodes.The capacitive effect of the samples under humidity has been investigated. Comparison of the samples with different thicknesses shows that the thinnest device seems more sensitive towards humidity.The humidity dependent capacitance properties of the sensor make it beneficial for use in commercial hygrometers.This study presents the fabrication and characterization of novel surface-type capacitive humidity sensors using vanadyl phthalocyanine（VOPc） as the active material.The devices,which comprise three different thicknesses, have been fabricated using the thermal evaporation technique.A thin film of VOPc is deposited on thoroughly cleaned glass substrates with pre-patterned Ag electrodes.The capacitive effect of the samples under humidity has been investigated. Comparison of the samples with different thicknesses shows that the thinnest device seems more sensitive towards humidity.The humidity dependent capacitance properties of the sensor make it beneficial for use in commercial hygrometers.

关 键 词：surface-type CAPACITANCE vanadyl phthalocyanine humidity sensor organic semiconductor 

分 类 号：TP212.1[自动化与计算机技术—检测技术与自动化装置]