基于LabVIEW的HCI参数测试系统设计  

Design of measurement system for HCI parameter based on LabVIEW

作　　者：时丙才[1] 李垚[1] 

机构地区：[1]中国科学技术大学微电子实验室,合肥230026

出　　处：《电子测量技术》2010年第10期56-59,72,共5页Electronic Measurement Technology

基　　金：安徽省自然科学基金资助项目(090412029)

摘　　要：为了解决利用仪器手动测量器件可靠性既效率不高,又容易出错的问题,根据热载流子可靠性测试原理,以LabVIEW8.5为平台设计了半导体器件HCI参数自动测试系统。介绍了该系统的硬件、软件构成,详细介绍了软件设计及功能实现。实验结果表明,该系统运行稳定,测量速度快,结果精度高,提高了测量人员的效率,且程序具有很好的扩展性。It is inefficient and error-prone to test devices by hands with apparatus.To solve this problem,based on the theory of the reliability test of hot carriers,An automatic testing system is designed regarding LabVIEW 8.5 as a platform in this paper.The hard/software construction of this system especially software design and its fuctional realization are introduced.The experimental results show that the system works steadily and measures accurately,which can improves the measuring efficiency to a great extent.Lastly it has good extendability in program function.

关 键 词：虚拟仪器 LABVIEW HCI 测试系统 

分 类 号：TP202.1[自动化与计算机技术—检测技术与自动化装置]