Progress in Sputtering Procedure for QWR Cavity  

作　　者：PENG Zhao-hua,ZHENG Jian,LV Zhao,ZHOU LI-peng,LI Ai-ling,ZOU Wei-Dong 

出　　处：《Annual Report of China Institute of Atomic Energy》2009年第1期130-131,共2页中国原子能科学研究院年报（英文版）

摘　　要：1 Introduction Several tests have been done in the QWR cavity sputtering system since the system was established in 2009.The sputtering system is checked out in these tests and the uniformity of sputtered film is measured also.1 Introduction Several tests have been done in the QWR cavity sputtering system since the system was established in 2009. The sputtering system is checked out in these tests and the uniformity of sputtered film is measured also.

关 键 词：溅射系统 薄膜均匀性 试验 

分 类 号：TN305.92[电子电信—物理电子学] TQ323.407[化学工程—合成树脂塑料工业]