p+n组合结构半导体甲苯气体传感器  

Study on p+n Combined Structure Semiconductor Toluene Gas Sensing Element

作　　者：杨留方[1,2] 王玉林[1,2] 王玉德[3] 

机构地区：[1]云南民族大学电气信息工程学院,云南昆明650031 [2]云南省高校无线传感器网络重点实验室,云南昆明650031 [3]云南大学佐波传感技术研究中心,云南昆明650091

出　　处：《仪表技术与传感器》2010年第10期12-14,23,共4页Instrument Technique and Sensor

基　　金：国家民委科学研究基金资助项目(08YN02);云南高校无线传感器网络重点实验室基金资助项目(09ZK05)

摘　　要：p+n型半导体气体传感器是基于气体传感器互补增强和互补反馈原理的一种新结构半导体气体传感器。该传感器由两种传导类型不同的敏感体A和B构成,A是p型半导体材料,B是n型半导体材料。理论分析表明:当敏感体A和B满足一定条件时,该种传感器具有高的灵敏度、好的选择性和热稳定性。在理论的指导下,通过实验获得了性能较好的p+n组合结构半导体甲苯敏气体传感器。P＋n structure semiconductor gas sensing element based on the compensation multiplication principle and compensation-feedback principle is a new type gas sensing element.This sensing element was composed of two sensitive materials A and B whose conductive types were not the same.The materials A is a p-type material,and B is a n-type material.The results analyzed from a theoretical viewpoint show that the sensing element has higher sensitivity,better thermal stability and high selectivity when the materials A and B satisfied certain conditions. Through testing the characteristics of the combined structure semiconductor gas sensing element,the perfect p＋n combined structure toluene gas sensing element is fabricated.

关 键 词：气体传感器 p+n组合结构 互补增强 互补反馈 灵敏度 热稳定性 甲苯 

分 类 号：TP212[自动化与计算机技术—检测技术与自动化装置]