影响RF激励CO_2波导激光器高效运转的因素  

A Discussion on the Factors of Making RF excited CO 2 Waveguide Laser High Efficiency Work

作　　者：刘玉华[1,2] 唐令西[1,2] 阮双琛[3] 

机构地区：[1]佛山大学物理系 [2]西北大学物理系 [3]中国科学院西安光学精密机械研究所

出　　处：《激光与红外》1999年第3期157-160,共4页Laser & Infrared

摘　　要：着重讨论了影响ＲＦ激光ＣＯ２波导激光器高效运转的几个因素，指出要提高ＲＦ功率的高效转换，必须获得均匀稳定的放电，其中阻抗匹配技术、ＲＦ源频率、气体混合比等起着重要作用。The article discussed some factors affecting RF excited waveguide CO 2 laser's high efficient work and pointed out that the high efficiency of RF power should be achieved after the even and unchangeable discharge was gained.The important factors of all are the matching technology of resistance RF power frequency and ration of mixed gas.

关 键 词：CO2波导激光器 高效转换 RF激光频率 激光器 

分 类 号：TN248.22[电子电信—物理电子学]