SnO_2复合薄膜甲烷气敏传感器研究进展  

Latest Development of Methane Sensors Made of SnO2 Composite Films

作　　者：李建昌[1] 韩小波[1] 韩娜[1] 巴德纯[1] 

机构地区：[1]东北大学机械工程与自动化学院真空与流体工程研究中心,沈阳110004

出　　处：《真空科学与技术学报》2010年第6期641-650,共10页Chinese Journal of Vacuum Science and Technology

基　　金：中央高校基本科研业务费专项资金资助项目(N090403001)

摘　　要：甲烷是具有稳定四面体分子结构的碳氢化合物,其键能大、分解困难且活性低,是煤矿安全生产的主要障碍及一种温室气体。SnO2半导体薄膜制备工艺简单、成本低廉、性能稳定,是甲烷传感器研发的主流气敏材料。科技人员进行了很多相关研究以提高传感器的性能,如新气敏材料的研究、催化剂/添加剂的使用、气敏机理的探索、传感器结构改进及气敏膜的表面修饰改性等。本文从气敏膜制备与改性、传感器结构设计及气敏机理研究三个方面,综述了近年来SnO2复合薄膜甲烷传感器的研究进展,结果表明:①应开发复合型金属氧化物半导体及高分子气敏材料,以提高灵敏度、选择性与稳定性;②研发微型智能传感器是未来发展的主要方向,而自组装技术应可用于制备金属氧化物半导体薄膜气体传感器微纳阵列;③气敏机理应与实验测试、材料设计及器件制备进行对照研究。The latest development of the SnO2 composite film based methane gas sensor,which is gaining basic and technological interest because of global warming and coal mine safety issues,was tentatively discussed in a thought-provoking way.The discussions focus on：a）Growth and surface modification technologies of a variety of gas sensing composite film materials,b）Design and fabrication considerations of methane gas sensor and its possible structures,c）Characterization of microstructures and properties and the gas sensing mechanisms.The strengths and weaknesses of the SnO2 composite films available were discussed as well.We propose：a） New metal oxide composite films be screened to improve the sensitivity,selectivity and stability of the sensor,b）Self-assembled metal-oxide semiconductor micro-arrays should be developed to fabricate miniaturized intelligent gas sensors,c）In-depth investigation of gas sensing mechanism should closely integrate with engineering practice.

关 键 词：甲烷 二氧化锡 气体传感器 金属氧化物半导体薄膜 

分 类 号：TP212.2[自动化与计算机技术—检测技术与自动化装置]