溶胶凝胶燃烧制备LSCO靶材的结构和电性能  

Structural and electrical properties of LSCO targets prepared by sol-gel self-combustion

作　　者：于军[1] 赵远[1] 闻心怡[1] 王耘波[1] 

机构地区：[1]华中科技大学电子科学与技术系,湖北武汉430074

出　　处：《华中科技大学学报（自然科学版）》2010年第11期1-4,共4页Journal of Huazhong University of Science and Technology(Natural Science Edition)

基　　金：国家自然科学基金资助项目(60971008);高等学校博士学科点专项科研基金资助项目(200804870071)

摘　　要：采用溶胶凝胶自燃烧法,选择不同的烧结温度和镧过量系数,制备出品质各异的La0.5Sr0.5CoO3靶材.分别使用X射线衍射仪(XRD)、环境扫描电子显微镜(ESEM)及四探针测试仪对靶材的成相品质、显微结构和电阻率进行表征.通过对比和分析,确定出最佳工艺为:烧结温度1200℃,镧过量系数0.03.由此制备出物相集中、晶粒均匀且结合致密、杂相及孔洞缺陷少的优质La0.5Sr0.5CoO3靶材.Different sintering temperatures and the coefficient of excess to La were chosen to prepare the excellent La0.5Sr0.5CoO3targets with the method of sol-gel self-combustion.The quality of the crystallization,microstructure and resistivity of the targets were characterized with the X-ray diffraction（XRD）,environmental scanning electron microscopy（ESEM）and four-probe meter,respectively.The optimal sintering temperature and La excess coefficient,1 200℃and 0.03respectively were determined through the comparison and analysis about the results.The targets could own more pure phase,better uniformity of grain,and to be compact with fewer voids.

关 键 词：La0.5Sr0.5CoO3(LSCO) 溶胶凝胶自燃烧 镧过量系数 靶材 电阻率 

分 类 号：TQ133.3[化学工程—无机化工]