溶胶-凝胶SiO2减反膜的表面修饰和抗污染特性  

SURFACE MODIFICATION AND CONTAMINATION RESISTANCE OF SOL-GEL SiO_2 DERIVED ANTIREFLECTIVE COATINGS

作　　者：沈军[1] 刘源[1,2] 李晓光[1] 

机构地区：[1]同济大学波耳固体物理研究所,上海市特殊人工微结构材料与技术重点实验室,上海200092 [2]上海理工大学理学院,上海200090

出　　处：《硅酸盐学报》2010年第11期2054-2058,共5页Journal of The Chinese Ceramic Society

基　　金：国家自然科学基金(11074189,50802064,50752001);国家科技支撑计划(2009BAC62B02);国家“863”计划;上海市科委(09520714300,10520706800,0952nm00700)资助项目

摘　　要：采用溶胶-凝胶法制备了用于高功率激光装置的SiO_2减反射膜,并在室温条件下采用气相法对该薄膜进行表面修饰。结果表明:修饰后薄膜的疏水性能、激光损伤阈值均有明显提高;其在大气环境下的耐候性与普通薄膜相当,但对有机污染物的抗性明显提高;经六甲基二硅胺烷修饰、氨气氛及热处理后的薄膜表现出对有机烷类良好的抗污染性能。The SiO_2 antireflective（AR） coatings for high peak power laser systems were prepared using sol-gel method,and vaporphase treated at room temperature with organosilanes such as hexamethyldisilazane（HMDS） and tnmethylchlorosilane（TMCS）.The results show that the post-treated sol-gel AR coatings are more hydrophobic than standard TEOS-based sol-gel AR coatings and presented an increase in their laser induced damage threshold.The post-treated coatings are as durable as normal SiO_2 AR coatings.But their resistance to contamination by a series of volatile organic compounds is better than those without post-treatment.The coatings treated with ammonia and HMDS after heat treatment show an even better contamination resistant capability to organic alkane.After being contaminated for 70 h with hexane,the transmittance of the coatings decreases only marginally.

关 键 词：溶胶-凝胶 二氧化硅减反薄膜 表面修饰 抗污染性 硅烷化 

分 类 号：O484.4[理学—固体物理]