集成激光位移传感器和编码器的曲面仿形测头研究  

Research on free-form surface measurement system with integrated laser displacement sensor and linear encoder

作　　者：袁江[1] 邱自学[1] 邵建新[1] 

机构地区：[1]南通大学机械工程学院,南通226019

出　　处：《仪器仪表学报》2010年第11期2488-2493,共6页Chinese Journal of Scientific Instrument

基　　金：国家自然科学基金(50875132)资助项目

摘　　要：为实现对大量程自由曲面的高精度仿形测量,提出了一种利用闭环运动控制技术集成激光位移器和线性编码器的新方法。采用线性编码器和精密线性机构以及运动控制卡组成Z向位移量伺服随动系统,步进电机自动调整激光位移传感器位置使其工作在中心范围(95～105mm)内,线性机构位移量可由线性编码器测量得到,自由曲面的起伏变化可通过激光位移传感器和线性编码器的输出而得到。与激光位移传感器进行了线性度、示值误差以及重复性等精度参数对比实验,结果表明系统在扩大测量范围的同时具备较高的测量精度。To measure wide-range free-form surface accurately, a new method is proposed based on close-loop motion control, which integrates laser displacement sensor and linear encoder. The moving system is composed of linear encoder, precision movable liner mechanism and servo machine. A stepping motor controls the laser sensor displacement position to keep its output in the central area of the detector measuring range through driving a ball screw. The linear encoder detects the moving displacement of the screw nut, and the displacement of the measured point is just equal to the sum of the outputs of the two sensors. Linearity, repetition and indication error tests show that the system can measure large range free-form surface accurately and reliably.

关 键 词：自由曲面 激光位移传感器 线性编码器 测量精度 

分 类 号：TH711[机械工程—测试计量技术及仪器]