以丙烯为碳源气的热解炭的制备及其沉积机理分析  

Study of Pyrocarbon Preparation and Mechanism of CVD Using Propylene as Precursor

作　　者：于澍[1] 陈洁[1] 黄启忠[1] 

机构地区：[1]中南大学粉末冶金国家重点实验室,长沙410083

出　　处：《材料导报》2010年第24期53-55,62,共4页Materials Reports

基　　金：国家自然科学基金(50702078);国家高技术研究发展计划(2009AA03Z536);国家重点基础研究"973"发展计划(2006CB600901);中南大学自由探索计划(201012200233)

摘　　要：以等温法进行化学气相沉积(CVD),研究了过程参数(反应温度、碳源气浓度以及炉内气体的滞留时间)对热解炭结构的影响。实验表明,以丙烯为碳源气,保持炉内气体的流动为层流运动方式,在中等温度(880℃)、中等滞留时间(2.19s)以及碳源气与载气体积比为1∶3时,能得到粗糙层(RL)结构的热解炭;碳源气裂解为小分子后,在气相中通过加成、聚合、脱氢环化等反应生成苯及含有六元环的芳香烃,才能沉积得到结构较好的热解炭。The effect of reaction temperatures, concentration of precursor gas and gas residence on pyrocarbons microstructure are studied. Optical microscopy is used to characterize the microstructure of pyrocarbons. The results indicate that the rough lamina can be only got under the condition that reaction temperature is moderate（880℃）, the gas residence time is moderate（2. 19s）, the ratio of the precursor gas and carrier is 1 ： 3 and the movement of gas keep the mode of laminar flow. Benzene and six-ring aryl hydrocarbon will lead to favorable microstructure pyrocarbon, which will form followed by the reaction of addition, polymerization, dehydrogenation, and ring of the little molecule organic compound that from cracked propylene.

关 键 词：热解炭 反应温度 滞留时间 

分 类 号：TB332[一般工业技术—材料科学与工程]