以低温泵为主泵的真空检漏系统研究  

Study on the leak detection system with cryopump as main pump

作　　者：孟冬辉[1] 闫荣鑫[1] 孙立臣[1] 刘恩均[1] 张海峰[1] 

机构地区：[1]北京卫星环境工程研究所,北京100094

出　　处：《真空》2010年第6期33-36,共4页Vacuum

摘　　要：由于分子泵对氦气有较大抽速,因此在真空检漏系统中通常用分子泵作为主泵,但当检漏容器很大时需要大量分子泵。低温泵具有清洁无油、抽速大的优点,如果在检漏系统中能够采用低温泵作为主泵,可以大大减少真空泵数量。本文对以低温泵为主泵的真空检漏系统进行了实验研究,并对实验现象进行了分析。研究结果表明,低温泵可以有效提高检漏系统的工作真空度,对检漏系统的有效灵敏度影响很小,但以低温泵为主泵的检漏系统的反应时间比以分子泵为主泵的检漏系统反应时间长。Usually a molecular pump is used as the main pump for the vacuum leak detection system because of its high helium pumping speed.However,the pumping speed of molecular pump is not enough for the leak detection of a large-size vacuum chamber.The cryopump that is clean and oil-free with high pumping-speed was therefore considered to use as the main pump instead of the molecular pump so as to decrease greatly the required number of vacuum pumps.For this reason,the cryopump was investigated experimentally as the main pump for the vacuum leak detection system,with the results discussed.It was revealed that the cryopump can decrease the vacuum pressure of the system efficiently,but it has no obvious influence on the system sensitivity.On the other hand,the response time of the vacuum leak detection system with cryopump as main pump is longer than the system with molecular pump as main pump.

关 键 词：检漏 低温泵 灵敏度 反应时间 

分 类 号：TB774[一般工业技术—真空技术]