基于87C196KB的自动真空测控系统研究  

On the automatic vacuum measuring control system based on 87C196KB

作　　者：黄有全[1] 李桂平[1] 

机构地区：[1]长沙民政学院电子信息工程系,湖南长沙410004

出　　处：《真空》2010年第6期59-62,共4页Vacuum

摘　　要：传统真空镀膜机的测量控制系统结构复杂、工作可靠性差、故障率高。用以16位单片机为核心的真空自动测量控制系统更新原控制系统后,对真空度、冷却水温、加热电流及各工作状态能进行实时测量,自动控制真空工作的全过程,能检测故障并自动采取相应的对策。实际应用结果表明,该控制系统是有效的。The measuring control system for conventional vacuum coaters is complicated in construction with low reliability and high failure rate.Upgrading the original control system by developing a new automatic vacuum measuring control system with the 16-bit single chip microcomputers as its core,the real-time measurement of working pressure,cooling water temperature,heating current and other working parameters were all available,especially the faults could be detected automatically with corresponding trouble-shooting measures taken.The operational results showed the effectiveness of the control system.

关 键 词：真空 测量 控制 设计 

分 类 号：TP202[自动化与计算机技术—检测技术与自动化装置]