高功率高重频TEA CO_2激光器激光放电腔技术  

High-energy Discharge Cavity Technology in High Power and High Repetition Rate TEA CO_2 Lasers

作　　者：耿玉民[1] 

机构地区：[1]中国科学院长春光学精密机械与物理研究所激光与物质相互作用国家重点实验室,吉林长春130033

出　　处：《光机电信息》2010年第11期25-31,共7页OME Information

摘　　要：介绍了高功率、高重频TEA CO2激光器激光放电腔的放电电路、结构及特点,针对该系统的性能实施了合理的技术设想及研究方法。在分析高功率TEA激光器技术基础上,讨论了TEA CO2激光器激光放电腔的基本机理。该系统由多只具有储能充、放电功能的陶瓷电容,通过低阻抗匹配传输线、放电电极和紫外光预电离装置向激光器高能放电腔注入电能,获得高重复频率脉冲和高能量脉冲,经光学谐振腔窗口输出高功率激光。描述了储能充放电路、高压快脉冲、低阻抗匹配传输线、放电电极和紫外光预电离等技术的具体应用。The structure,property and discharge circuit of high-energy discharge cavity are introduced in the high-power and high repetition rate TEA CO2 lasers.The technical scheme and research method are presented toward the performance of the system.The basic mechanism of the high-energy discharge cavity is discussed based on the analysis of the technology in the high-power TEA CO2 lasers.The system consists of several ceramic capacitors with accumulation of energy,charge and discharge.The electric energy is injected into high-energy cavity of laser through the transmission line of low resistance matching,discharge electrode and preionization device of ultraviolet light.The high repetition rate and high-power pulse of CO2 lasers are obtained through the window of optical resonator.The specific applications of technology are described such as charge and discharge circuit,high voltage fast pulse,low resistance matching transmission line,discharge electrode and preionization of ultraviolet light,etc.

关 键 词：TEA CO2激光器 激光放电腔 放电电极 紫外光预电离 

分 类 号：TN248.2[电子电信—物理电子学]