高密度单光栅衍射光干涉线位移测量系统  

Diffractive light interference linear displace measurement system with high density single grating

作　　者：李琳[1,2] 杨鹏[1,2] 艾华[1] 

机构地区：[1]中国科学院长春光学精密机械与物理研究所,吉林长春130033 [2]中国科学院研究生院,北京100039

出　　处：《传感器与微系统》2010年第11期101-103,共3页Transducer and Microsystem Technologies

基　　金：吉林省自然科学基金资助项目(20030534)

摘　　要：为了突破传统的双光栅线位移测量系统结构和原理的限制,使用高密度光栅来提高测量精度与分辨力,介绍了一种采用高密度单光栅测量系统的光学结构,其采用衍射光干涉产生原始信号,具有光学四倍频,采用偏振移相的方法获得四路空间相位相差90°的原始信号。原始信号具有无其他谐波分量、正弦性和正交性好的优点。根据系统设计制作了样机,样机采用4 17 lp/mm的光栅,原始信号周期0.6μm,经过1 024电子学细分后,系统分辨力0.586 nm,将系统的测量结果与HP5528干涉仪进行比较,实验结果表明:系统在100mm测量范围内精度达到0.1μm。这种线位移测量系统结构紧凑,分辨力高,精度高,可在众多需要高精度线位移传感器的场合中应用。In order to improve the measurement precision of the traditional two-grating measurement system, high density grating is used owing to its configuration and measurement principle. A single grating measurement system using high density grating is introduced. This system uses diffractive light interference to produce original signal. It has optical fourth frequency doubling, using polarization phase-shifting method is used to obtain four signals with ordinal phase delay by 90°. Since the original signals don＇ t contain other harmonic component. A model machine was designed and made according to the system, in which the grating＇s density is 4 17 lp/mm, and the original signal＇s period is 0.6 um. The resolution of the system is 0. 586 nm after the 1 024 times electronics subdivision. The measurement results by the machine were compared with HP 5528 interferometer. The experiment results show that the precision of the system is 0.1 um at 100mm measuring range. This linear displacement measuring system has the advantage of compact structure, high resolution, high precision. It can be used in a number of occasions where high precision linear displacement is required .

关 键 词：单光栅 纳米测量 衍射光干涉 

分 类 号：TP212.14[自动化与计算机技术—检测技术与自动化装置]