聚合物棱镜耦合SPR芯片的研究  

Surface Plasmon Resonance Sensor Coupled by PDMS Prism and Glass Layer

作　　者：耿照新[1,2] 邢冰冰[1] 王继业[1] 陈志红[1] 

机构地区：[1]中央民族大学信息工程学院,北京100081 [2]北京大学微电子所微纳米加工技术国家重点实验室,北京100871

出　　处：《中央民族大学学报（自然科学版）》2010年第4期46-55,共10页Journal of Minzu University of China(Natural Sciences Edition)

基　　金：中国博士后科学基金面上资助项目(No.20090460497);中央民族大学青年基金项目(No.98502-006001)

摘　　要：为了开发用于生物医学和化学检测的小型化表面等离子体谐振分析芯片,采用了体硅工艺和聚合复制工艺,研制出聚合物棱镜与耦合玻璃层的SPR芯片及微流体沟道.在理论上分析了聚合物折射率、耦合玻璃层的折射率和厚度、金膜厚度及光学干涉对SPR曲线的影响,分析表明聚合物与耦合玻璃层的折射度差值是影响SPR曲线的主要因素.在波长650 nm,金膜厚度为50 nm时,采用角度调制的方式,测试以水和空气为介质的SPR曲线,测试结果与理论分析很相近.To develop a miniaturized surface plasmon resonance（SPR） chip for biomedical and chemical analysis with low cost and high performance,the techniques of bulk silicon micromachining and polymer replication were used to fabricate the Kretschmann SPR sensor composed of a Polydimethylsiloxane（PDMS） prism,a coupling glass and microchannels.The plasmonic properties of thin metal films were investigated theoretically based on Fresnel analysis,with optical boundary conditions pertaining to the surface plasmon resonance at interfaces.Many aspects such as the refractive index（RI） and thickness of coupling glass layer,the RI of PDMS and interference fringe were analyzed theoretically.The theoretical results showed that difference of the refractive index（RI） between the PDMS prism and the coupling glass layer affected the precision of the SPR angle and the SPR curve.The gold thickness of 50nm was required while employing a fixed incident wavelength of 650 nm,to achieve optimum SPR excitation conditions and the sensor sensitivity.The characteristics of this SPR sensor were evaluated in the angular interrogation mode employing the incident wavelength of 650 nm in air and water media,respectively.The obtained SPR angles were approximately consistent with the theoretical ones.

关 键 词：SPR 微流体 聚合物棱镜 

分 类 号：TH302[机械工程—机械制造及自动化]