聚酯基片上制备FeCoB-SiO_2薄膜的微观结构与微波电磁特性  

Microstructural and Microwave Electromagnetic Properties of FeCoB-SiO_2 Film on PET Substrate

作　　者：张丽[1] 朱致伟[1] 旷仁熊[2] 邓龙江[1] 

机构地区：[1]电子科技大学微电子与固体电子学院,成都610054 [2]中国电子科技集团第二十九研究所,成都610036

出　　处：《无机材料学报》2010年第11期1150-1154,共5页Journal of Inorganic Materials

摘　　要：基于射频磁控溅射法在柔性聚酯薄膜(PET)基片上制备FeCoB-SiO2薄膜.研究发现在PET基片上沉积的FeCoB-SiO2薄膜呈非晶态,其电阻率高达1755.73μ-.cm,饱和磁化强度为0.7 T.由于非磁性相对畴壁位移的阻力作用,使得FeCoB-SiO2非晶膜的矫顽力远大于一般磁性金属非晶薄膜,其矫顽力达13130.205 A/m.使用同轴传输法的微波参数测量结果表明在3.8和5.0 GHz处出现了双共振峰,使得在500MHz^12GHz范围内μ'>2.5,μ''在3.6~8.0 GHz,其值超过6,在较宽的频带范围内有着良好的微波电磁特性.Microstructural and electromagnetic properties of FeCoB-SiO2 films prepared on PET substrates by radiofrequency sputtering were investigated. The as-deposited FeCoB-SiO2 films are found to be amorphous with an electrical resistivity of 1755.73μΩ·cm and a saturation magnetization of 0.7 T. Because of the existence of non-magnetic matrix resistance to magnetic wall displacement, those FeCoB-SiO2 films have a substantially higher coercivity of 13130.205 A/m over that of traditional amorphous magnetic films. Complex permeability μ was measured by a microwave network analyzer using the coaxial transmission technique, and double resonance peaks in microwave magnetic permeability were observed in the frequency range of 3.8-5.0 GHz. This is beneficial for the films to be used as a micro absorber at large bandwidths, resulting in μ＇〉2.5 in the frequency range of 500 MHz-12 GHz and/μ＂〉6 for 3.6-8.0 GHz. The experimental results demonstrate that the FeCoB-giO2 films deposited on flexible substrates have good potential for high frequency applications.

关 键 词：微波电磁特性 聚酯基片 磁导率 

分 类 号：TB33[一般工业技术—材料科学与工程]