α粒子能损法精确测量膜厚  

Accurate film thickness measurement using α particle energy loss method

作　　者：车彦明[1] 陈拓[1] 陈星[1] 

机构地区：[1]浙江大学理学院物理学系,浙江杭州310027

出　　处：《物理实验》2010年第12期24-27,共4页Physics Experimentation

基　　金：浙江大学研究生核心课程建设项目(No.188310;No.123220111);2008年度国家大学生创新性实验计划

摘　　要：利用α射线与材料的相互作用设计测量薄膜厚度的方法.用SRIM软件模拟计算了α粒子在Au膜和核乳胶中的运动,对Au膜厚度、α粒子在核乳胶中的射程实验数据结果分别用Mathematica数值求解和SRIM软件计算.可根据径迹的长短、粗细鉴定粒子的种类和能量.Based on the interactions of α particle and materials,a method to measure film thickness accurately is developed.The movements of α particle in Au film and emulsion are simulated using SRIM program.The experimental data of the thickness of Au film and the range of α particle in the emulsion are calculated using Mathematica and SRIM program.The types and energy of particle are determined according to the length and thickness of the track.

关 键 词：Α粒子 膜厚 核乳胶 SRIM软件 

分 类 号：O561.5[理学—原子与分子物理]