基于石英玻璃基底湿敏元件的模型比较研究  

The comparing study on the model of humidity element based on quartz glass substrate

作　　者：冯冬梅[1] 李巴津[1] 宋丽丽[1] 

机构地区：[1]内蒙古工业大学信息工程学院,内蒙古呼和浩特010051

出　　处：《传感器与微系统》2010年第12期15-18,共4页Transducer and Microsystem Technologies

基　　金：内蒙古自治区自然科学基金资助项目(2009MS0912)

摘　　要：对基于石英玻璃基底制备的TiO2-20%SnO2薄膜湿敏元件进行复阻抗分析,采用Origin7.5软件绘出不同湿度下的复阻抗图。在Zsimpwin软件环境下,利用3种不同的等效电路模型对该湿敏元件的复阻抗图进行拟合和误差分析比较。研究表明:引入Q元件的等效电路模型是合理的,该等效电路模型便于对薄膜离子的扩散与感湿机理进行分析。20 % Sn4＋-doped Titania films humidity element prepared on the quartz glass substrate was analyzed by using complex impedance analysis, the impedance spectra were protracted in different humidity by Origin7.5 software. Under the Zsimpwin software environment, three different equivalent circuits models were used for fitting the impedance spectra of the element, error analyzing and contrasting. The results show that the equivalent circuit of Q component is reasonable. It is convenient for the analysis of the diffusion of the ion on the thin films and the humidity sensing mechanism.

关 键 词：湿敏元件 等效电路模型 复阻抗图 Q元件 

分 类 号：TP212[自动化与计算机技术—检测技术与自动化装置]