PDMS用加窗方式快速复制微结构  

PDMS molding technology using in extract typical characteristic in microfluidic-chip

作　　者：刘畅[1] 郑小林[1,2] 廖彦剑[1] 杨军[1] 杨国清[1] 

机构地区：[1]重庆大学生物工程学院,重庆400030 [2]新型微纳器件与系统技术国家重点学科实验室,重庆400044

出　　处：《传感器与微系统》2010年第12期58-59,63,共3页Transducer and Microsystem Technologies

基　　金：重庆市自然科学基金资助项目(CTST2007BB5165);重庆市"十一五"科技重大专项基金资助项目(CSTC2008AA5010);国家高技术研究发展计划资助项目(2006AA04Z343);国家自然科学基金资助项目(30870661;30770569;30500120)

摘　　要：提出了一种微流控芯片中的制作方法,此方法可以复制现有芯片的任意结构,可用于实验室原有芯片的修复和整合。用窗口的方法提取结构,可排除芯片上相邻结构的干扰,得到表面光滑整齐的新芯片。特别适用于复制目前软光刻工艺尚未达到的特微结构和三维结构芯片。实验制作出的聚二甲基硅氧烷(PDMS)芯片沟道长30μm,宽5μm,深5μm,显微镜下观察芯片表面光滑,窗口内沟道性质复制良好,窗口边缘与表面之间具有明显的陡变。A microfluidic chip production method which can copy an arbitrary factions in an existing chip is presented, It can he used for repairing and integration of existing chips in laboratory. The structure is extracted by a window method which may exclude adjacent structures interfere with the extracting chip to keep the surface of new chip smooth and tidy. It is particularly applicable to replica molding the special micro-structure and three- dimensional structure of chips which the current soft-lithography replication process could not realized yet. The PDMS chip produced in the experiment has a 30 μm-long 5 μm-wide,5 μm-deep channel. Observed under the microscope, the surface is smooth, the nature of window-channel sound reproduction, the edge between the window and the surface apparents a sadden change.

关 键 词：聚二甲基硅氧烷 模塑法 微流控芯片 软光刻窗口提取 

分 类 号：R318.01[医药卫生—生物医学工程]