单晶硅电火花铣削电极损耗研究  

Research for Electrode Wear of Monocrystalline Silicon by Electrical Discharge Milling

作　　者：鲁清[1] 刘志东[1] 邱明波[1] 田宗军[1] 黄因慧[1] 

机构地区：[1]南京航空航天大学机电学院,江苏南京210016

出　　处：《电加工与模具》2010年第6期13-16,39,共5页Electromachining & Mould

基　　金：国家自然科学基金资助项目(50975142);江苏省科技支撑计划资助项目(BE2009161)

摘　　要：提出了一种以电火花加工技术对半导体硅材料进行铣削加工的方法,分别进行了单晶硅和45钢的电火花铣削加工,发现铣削单晶硅的电极体积相对损耗仅为0.41%,而45钢达到9.22%。针对此现象,从蚀除机理、放电间隙以及放电电流的爬坡特性方面对单晶硅放电加工特性进行了研究,并解释了其电极损耗低的原因。最后研究了不同加工规准下,单晶硅电火花铣削加工电极相对损耗的工艺规律。This paper puts forward a method to mill semiconductor silicon material by EDM.Monocrystalline silicon and 45 steel are milled respectively.Results show： relative electrode wear is only 0.41% for milling monocrystalline silicon,compared to 9.22% for milling 45 steel.On this basis,discharge characteristics of monocrystalline silicon are researched from erosion mechanism,discharge gap and climbing characteristics of current;meanwhile,an explanation to the cause of low electrode wear is given.Finally,process principle of relative electrode wear for monocrystalline silicon milling is studied using different machining parameters.

关 键 词：单晶硅 电火花铣削 电极损耗 放电特性 

分 类 号：TG661[金属学及工艺—金属切削加工及机床]