气相色谱法测定NF3气中CHF3的方法研究  

Method Research on Gas Chromatography Analysis of CHF3 in NF3 Gas

作　　者：郭英[1] 李翔宇[1] 李本东[1] 

机构地区：[1]中国船舶重工集团公司第七一八研究所

出　　处：《舰船防化》2010年第6期37-40,共4页

摘　　要：本文介绍用气相色谱热导检测器分析NF3气中CHF3的方法。并根据浓度的不同采样及样品处理方法,用GC-14C气相色谱法测定,色谱柱为PorapakQ柱,检测器为TCD热导检测器。该方法灵敏度高,线性好,本方法检出限为1×10-6v/v。This article describes gas chromatography analysis of CHF3 in NF3 gas using thermal conductivity detector. And in accordance with the concentration of different samplings and sample processing methods, the GC-14C gas chromatography, column of Porapak Q column were detected by TCD thermal conductivity detector. The method has high sensitivity, good linear detection and the limit of 1×10-6v/v.

关 键 词：气相色谱 热导检测器 三氟化氮 三氟甲烷 

分 类 号：O657.71[理学—分析化学]