用于光互连的聚硅氧烷脊型光波导研究  

Study on polysiloxane ridge multimode optical waveguides for optical interconnection

作　　者：冯向华[1,2] 温昌礼[1] 季家镕[1] 窦文华[3] 

机构地区：[1]国防科技大学光电科学与工程学院,湖南长沙410073 [2]解放军信息工程大学理学院,河南郑州450001 [3]国防科技大学计算机学院,湖南长沙410073

出　　处：《光电子．激光》2011年第1期38-41,共4页Journal of Optoelectronics·Laser

基　　金：国家"863"高技术发展计划资助项目(2007AA01Z2a5)

摘　　要：采用软成型和图案转移技术,制备了可用于高速芯片间光互连的大尺寸聚硅氧烷脊型光波导,光波导长度达23 cm。利用有效折射率法,对芯层残留层和传输模场的关系进行了分析。采用截断和数字化散射两种方法,测得输入光波长为633 nm时的平均传输损耗小于0.14 dB/cm。研究结果表明,波导的长度和损耗指标满足高速芯片间光互连的要求。Large-scale polysiloxane ridge multimode optical waveguides applied for inter-chip optical interconnection were designed and fabricated by the soft molding and pattern transferring.Length of the fabricated waveguides was more than 23 cm.The relationship between core residual layer and propagation mode was analyzed by the effective refractive index method.The optical propagation loss of waveguides was 0.14 dB/cm measured by the cutback method and 0.13 dB/cm measured by CCD camera photographing method at 633 nm.It can fulfill the demand of optical interconnection.

关 键 词：片间光互连 聚硅氧烷波导 软成型 图案转移 传输损耗 

分 类 号：TN252[电子电信—物理电子学]