基于白光倾斜扫描干涉术的微结构测量方法  

Micro-structure measurement by white light tilt scanning interferometry

作　　者：马龙[1] 郭彤[1] 赵健[1] 陈津平[1] 傅星[1] 胡小唐[1] 

机构地区：[1]天津大学精密测试技术及仪器国家重点实验室,天津300072

出　　处：《光电子．激光》2011年第1期91-94,共4页Journal of Optoelectronics·Laser

基　　金：国家自然科学基金资助项目(91023022);科技部国际科技合作与交流项目(2008DFA71610);天津市自然科学基金项目(09JCYBJC05300)

摘　　要：针对白光垂直扫描干涉技术由于测试系统中物镜视场和移相器的行程限制,使其不能进行较大横向范围的测试。本文使用白光倾斜扫描干涉术代替垂直扫描,以扩展其横向测量范围,提高测试效率。基于纳米测量机(NMM)搭建了测试系统,由NMM代替传统的压电陶瓷(PZT)带动被测物体进行倾斜扫描。分析了倾斜扫描的测量原理,针对本系统提出了倾斜扫描的实现方法,通过对MEMS器件上台阶结构的测试说明本方法的有效性。White light vertical scanning interferometry has grown to be a standard measurement method for the MEMS industry.However,due to the limits of the objective′s field of view and the phase-shifting range in the test system,it can not perform large scope transverse testing.In this paper,a white light tilt scanning interferometry was presented to expand the lateral measuring range and improve the testing efficiency.The experimental system was set up based on nano-measuring machine（NMM）.During the tilt scanning,the object was drived by the nano-measuring machine instead of the traditional piezoelectric ceramics.The measuring principle of white light tilt scanning interferometry was given,followed by the realization of the method on the proposed system.The effectiveness of the method was also illustrated by measuring the step-alike structure on the MEMS device.

关 键 词：微结构 白光干涉技术 倾斜扫描 大范围 纳米测量机(NMM) 

分 类 号：TN247[电子电信—物理电子学]