旋转非对称项面形误差绝对检测的仿真分析  

Simulation Analysis of Absolute Measurement for Rotationally Asymmetric Surface Error

作　　者：杨鹏[1,2] 伍凡[1] 侯溪[1] 

机构地区：[1]中国科学院光电技术研究所,成都610209 [2]中国科学院研究生院,北京100039

出　　处：《光电工程》2011年第1期93-97,102,共6页Opto-Electronic Engineering

摘　　要：为满足光学元件的高精度检测要求,绝对检测技术取代传统相对检测技术被越来越多的用于光学检测过程中。然而传统绝对检测法检测都有各自适用的范围且检测过程复杂对实验仪器的精度要求较高。在某些只需要获得旋转非对称面型误差的检测领域旋转平均法成为一种简单易行的绝对检测手段。旋转平均法适用于平面、球面与非球面旋转非对称面型检测。本文对旋转平均法的原理进行了介绍,利用光学设计软件对旋转平均法的检测过程进行仿真。利用仿真检测对待测面形的旋转非对称项误差及kNθ旋转对称项进行量化分析,仿真分析出的结果与理论结果较好的吻合。仿真分析的实验结果表明:利用旋转平移法可有效提高非旋转对称面形检测的精度,实验仿真模型可有效对实际检测过程进行仿真。To meet the high accuracy optical testing requirement, the absolute measurement technologies instead of traditional testing techniques are more and more used in optical testing. However, the traditional absolute measurement technology has its own scope and complexity of the experimental process which required experimental equipment with high precision. In the filed of only rotationally asymmetric surface error required, rotating average method is a simple absolute measurement technology. Rotating average method is applied to rotationally asymmetric surface error testing of plane, spherical and aspheric. The principle of rotation averaging method was introduced. Then optical design software was used to simulate the testing process of rotation averaging method. By simulation test, the shape of the rotation asymmetric error and the kNθ rotation error were analyzed, simulation results in good agreement with theoretical results. Simulation experiment results show that rotating average method can effectively improve the testing precision of rotational asymmetric surface shape and the experimental simulation model can effectively simulate the actual testing process.

关 键 词：光学检测 旋转非对称项绝对检测 仿真分析 

分 类 号：TH744.3[机械工程—光学工程] TN247[机械工程—仪器科学与技术]