硅压阻传感器稳定性品质的研究  

Research on the Stability of Piezoresistive Sensor's Quality

作　　者：陈信琦[1] 季安[1] 

机构地区：[1]沈阳仪器仪表工艺研究所

出　　处：《仪表技术与传感器》1999年第8期1-2,29,共3页Instrument Technique and Sensor

摘　　要：根据多年研制硅压阻传感器的经验，定性地归纳和探讨硅压阻传感器稳定性的主要影响因素，并提出相应的预防和解决措施。It is qualitatively discussed and concluded in this paper some main factors to effect the stability of pieioresitive pressure sensons as well as given and the related precautions and measures to solve them according to the experinces accamulatd many years in the research and fabrication of the piezoresistive pressure sensor.

关 键 词：硅压阻传感器 稳定性 传感器 

分 类 号：TP212.02[自动化与计算机技术—检测技术与自动化装置]