大口径光学系统测试用双回转子孔径扫描装置设计与误差分析  

Analysis of a Sub-Aperture Scanning Machine with Double-Rotating Arms for Large-Aperture Optical System Transmittance Measurements

作　　者：赫英威[1] 李平[2] 冯国进[2] 王煜[2] 刘子龙[2] 郑春弟[2] 吴厚平[2] 李成[2] 沙定国[1] 

机构地区：[1]北京理工大学光电学院,北京100081 [2]中国计量科学研究院光学与激光计量科学研究所,北京100013

出　　处：《光学学报》2011年第1期116-122,共7页Acta Optica Sinica

摘　　要：设计了一种新颖的双回转子孔径扫描装置,得到了可以覆盖大口径光学系统全口径的子孔径扫描光斑,从而满足了大口径光学系统光谱透射特性的测试需求。结合双回转扫描装置的结构参数误差,基于齐次坐标变换矩阵原理,建立了双回转扫描装置的数学模型,提出了一套分析子孔径扫描精度的方法,并且在设计双回转子孔径扫描装置中实现了应用。分析结果表明,当双回转子孔径扫描装置的回转半径rη≤400mm时,子孔径扫描精度Δrη为-0.007～0.028mm。提出的子孔径扫描误差估计方法、建立的扫描运动坐标转换模型和得到的误差数据结果可作为类似回转扫描机构的设计参考,也为基于双回转子孔径扫描方法的大口径光学系统光谱透射特性测试的深入研究提供了理论依据和数据基础。For the purpose of large-aperture optical system spectral transmittance measurements,a novel double-rotating scanning machine with double-rotating arms（SSMDA） is designed.The sub-aperture scanning beam spot obtained from the SSMDA can cover full aperture of large optical system.By considering the structural parameters errors,mathematical models of the SSMDA based on homogeneous coordinate transformation matrixes are developed.A detailed methodology for analyzing the scanning errors Δηr is proposed and implemented in practical design process.The computational results of scanning errors Δηr carried out on the mathematical models are between-0.007 nm and 0.028 mm while scanning radius ηr≤400.000 mm.The proposed methodology,developed mathematical models and obtained computational results can be not only the design reference for similar machines but also the theoretical and data basis for large-aperture optical system spectral transmittance measurements based on double-rotating sub-aperture scanning method.

关 键 词：光学测量 双回转子孔径扫描 齐次坐标变换矩阵 大口径光学系统 透射比 

分 类 号：TB96[机械工程—光学工程]