Dynamic Calibration of the Cutting Temperature Sensor of NiCr/NiSi Thin-film Thermocouple  

作　　者：CUI Yunxian YANG Deshun JIA Ying ZENG Qiyong SUN Baoyuan 

机构地区：[1]School of Mechanical Engineering, Dalian Jiaotong University, Dalian 116028 [2]Key Laboratory for Precision and Non-traditional Machining Technologge of Ministry , China of Education Dalian University of Technolog2, Dalian 116024, China [3]College of Quality ＆ Safety Engineering, China Jiliang University Hangzhou 310018, China

出　　处：《Chinese Journal of Mechanical Engineering》2011年第1期73-77,共5页中国机械工程学报（英文版）

基　　金：supported by National Natural Science Foundation of China(Grant No.50775210);Liaoning Provincial Natural Science Foundation of China(Grant No.20062143);Liaoning Provincial Universities Science and Technology Program of China(Grant No.05L023)

摘　　要：In high-speed cutting, natural thermocouple, artificial thermocouple and infrared radiation temperature measurement are usually adopted for measuring cutting temperature, but these methods have difficulty in measuring transient temperature accurately of cutting area on account of low response speed and limited cutting condition. In this paper, NiCr/NiSi thin-film thermocouples（TFTCs） are fabricated according to temperature characteristic of cutting area in high-speed cutting by means of advanced twinned microwave electro cyclotron resonance（MW-ECR） plasma source enhanced radio frequency（RF） reaction non-balance magnetron sputtering technique, and can be used for transient cutting temperature measurement. The time constants of the TFTCs with different thermo-junction film width are measured at four kinds of sampling frequency by using Ultra-CFR short pulsed laser system that established. One-dimensional unsteady heat conduction model is constructed and the dynamic performance is analyzed theoretically. It can be seen from the analysis results that the NiCr/NiSi TFTCs are suitable for measuring transient temperature which varies quickly, the response speed of TFTCs can be obviously improved by reducing the thickness of thin-film, and the area of thermo-junction has little influence on dynamic response time. The dynamic calibration experiments are made on the constructed dynamic calibration system, and the experimental results confirm that sampling frequency should be larger than 50 kHz in dynamic measurement for stable response time, and the shortest response time is 0.042 ms. Measurement methods and devices of cutting heat and cutting temperature measurement are developed and improved by this research, which provide practical methods and instruments in monitoring cutting heat and cutting temperature for research and production in high-speed machining.In high-speed cutting, natural thermocouple, artificial thermocouple and infrared radiation temperature measurement are usually adopted for measuring cutting temperature, but these methods have difficulty in measuring transient temperature accurately of cutting area on account of low response speed and limited cutting condition. In this paper, NiCr/NiSi thin-film thermocouples（TFTCs） are fabricated according to temperature characteristic of cutting area in high-speed cutting by means of advanced twinned microwave electro cyclotron resonance（MW-ECR） plasma source enhanced radio frequency（RF） reaction non-balance magnetron sputtering technique, and can be used for transient cutting temperature measurement. The time constants of the TFTCs with different thermo-junction film width are measured at four kinds of sampling frequency by using Ultra-CFR short pulsed laser system that established. One-dimensional unsteady heat conduction model is constructed and the dynamic performance is analyzed theoretically. It can be seen from the analysis results that the NiCr/NiSi TFTCs are suitable for measuring transient temperature which varies quickly, the response speed of TFTCs can be obviously improved by reducing the thickness of thin-film, and the area of thermo-junction has little influence on dynamic response time. The dynamic calibration experiments are made on the constructed dynamic calibration system, and the experimental results confirm that sampling frequency should be larger than 50 kHz in dynamic measurement for stable response time, and the shortest response time is 0.042 ms. Measurement methods and devices of cutting heat and cutting temperature measurement are developed and improved by this research, which provide practical methods and instruments in monitoring cutting heat and cutting temperature for research and production in high-speed machining.

关 键 词：thin-film thermocouple cutting temperature sensor dynamic calibration one-dimensional unsteady heat conduction response time 

分 类 号：TP212[自动化与计算机技术—检测技术与自动化装置] TH811[自动化与计算机技术—控制科学与工程]