铝靶电流对磁控溅射AlSn20镀层耐蚀性的影响  

Effects of Aluminum Target Current on the Corrosion Resistance of AlSn20 Coating Deposited by Magnetron Sputtering

作　　者：郭巧琴[1,2] 蒋百灵[1] 李建平[2] 吴兵[1] 

机构地区：[1]西安理工大学材料科学与工程学院 [2]西安工业大学材料与化工学院

出　　处：《特种铸造及有色合金》2010年第12期1150-1152,共3页Special Casting & Nonferrous Alloys

基　　金：陕西省教育厅专项科研计划项目(09JK481);陕西省薄膜技术与光学检测重点实验室开放基金资助项目

摘　　要：采用非平衡磁控溅射镀膜设备通过改变铝靶电流在铝基轴承合金表面制备了AlSn20镀层。并对镀层的交流阻抗谱和塔菲尔曲线进行了电化学研究,定量分析了镀层的耐蚀性,并用失重法进行了进一步验证。利用SEM研究了镀层表面微观结构。结果表明,铝靶电流为1.5A时,轴承合金磁控溅射AlSn20镀层使合金的电化学阻抗提高5～6个数量级,可将镀层的自腐蚀电位提高到-1.12V,改善轴承合金的耐蚀性。铝靶电流是影响AlSn20镀层耐蚀性的一个重要因素,铝靶电流越小,其耐蚀性越好。AlSn20 coating was prepared on bearing alloy by non-equilibrium magnetron sputtering changing aluminum target current, and corrosion resistance of the prepared coating was quantitatively analyzed by impedance spectroscopy and the Tafel polarization curves, which was validated by agravity. Microstructure of coating surface was observed by SEM (scanning electron microscope). The results reveal that, with 1.5A aluminum target current, AlSn20 coating can greatly improve the corrosion resistance of bearing alloy as a result of increasing electrochemical impedance to about 5 to 6 order of magnitude and self-corrosion potential to-1.12V. Corrosion resistance of AlSn20 coating is closely related to aluminum target current. With decreasing in aluminum target current, corrosion resistance of coating is improved increasingly.

关 键 词：轴承合金 AlSn20镀层 耐蚀性 自腐蚀电位 

分 类 号：TG174.4[金属学及工艺—金属表面处理]