用电子探针定量分析元素化学状态  

Quantitative analysis of chemical state of elements by EPMA

作　　者：王道岭[1] 孙爱芹[1] 

机构地区：[1]中国科学院金属研究所分析测试部,辽宁沈阳110016

出　　处：《电子显微学报》2010年第6期527-529,共3页Journal of Chinese Electron Microscopy Society

摘　　要：本文介绍了一种用电子探针波谱仪对元素化学状态进行定量分析的方法:分析元素不同化学状态相关特征X射线的差异,选取有代表性的波长值作为检测点采集一系列强度值,结合线性最小二乘计算,最终可得到单独一种价态的含量。电子探针具有微米级的空间分辨率和激发深度,在状态分析上可以成为X射线光电子能谱的有益补充。A method for quantitative analysis of chemical state of elements by electron probe micro-analyzer（EPMA） is introduced in this paper.When the valence states of elements are different,the related characteristics X-ray differ in spectra shape and in peak position and intensity.Taking these characteristic differences of spectra as the basis vector,the content of each valence state can be given through the application of linear least square method.In comparison with X-ray photoelectron spectroscopy（XPS）,the advantages of EPMA in chemical state analysis are one-micron lateral resolution and micron-sized excitation depth.

关 键 词：电子探针 化学状态 定量分析 特征X射线 线性最小二乘计算 X射线光电子能谱 

分 类 号：O657.1[理学—分析化学]