EMX-SM型电子探针波谱仪的调整原理和方法  

Principle and method of adjustment of EPWDS with the type of EMX-SM

作　　者：陈方玉[1] 许竹桃[1] 

机构地区：[1]武汉钢铁(集团)公司研究院,湖北武汉430080

出　　处：《电子显微学报》2010年第6期544-548,共5页Journal of Chinese Electron Microscopy Society

摘　　要：以EMX-SM型电子探针传动机构、分光晶体和谱仪板的调节部件为基础,建立晶体直进波长正比谱仪的失调模型,经过解析,获得反映谱仪状态的直线束方程,推导出聚焦圆正偏离和负偏离判据,得到波谱仪调整方向和具体步骤,结合实例详解谱仪实际调整过程。Based on the component of adjustment on transmission mechanism,analyzer crystal,spectrometer panel in the EPWDS with the Type of EMX-SM,the adjusted model is established on proportional spectrometer with crystal straight-line wave-length.Through resolution,the pencil of lines equation which reflects spectrometer status is obtained,and the criterion of the positive and negative deviation about focal circle is deduced,then the direction of adjustment and concrete step about WDS is acquired.Finally,the example of actual adjustment process is introduced in detail.

关 键 词：电子探针 波谱仪 分光晶体 聚焦圆 直进正比 X射线 

分 类 号：TH834[机械工程—仪器科学与技术]