静电微泵吸合与释放特性研究  

RESEARCH ON PULL-IN AND RELEASE PHENOMENON OF ELECTROSTATIC MICROPUMPS

作　　者：应济[1] 李俊[1] 王硕[1] 徐亮[1] 

机构地区：[1]浙江大学机械工程学系,杭州310027

出　　处：《机械强度》2011年第1期68-72,共5页Journal of Mechanical Strength

基　　金：浙江省自然科学基金重点项目(Z106519);国家自然科学基金项目(50475104)资助~~

摘　　要：为避免静电微泵因驱动电压过高而出现吸合现象,建立描述静电泵膜吸合与释放现象的一维集中质量模型、二维分布式模型和三维有限元模型,对比研究静电致动泵膜在准静态下吸合与释放的循环过程,获得整个循环过程的泵膜挠曲线变化、泵腔体积变形、电容变化等大量的数据与曲线。比较结果表明,二维分布式模型求解效果最好,并利用三维有限元模型和宏模型的计算结果,验证该模型在泵膜大变形下计算吸合过程的准确性,获得的吸合电压为确定静电微泵驱动电压的上限值提供有效依据。Electrostatically actuated circular microplates are widely used in MEMS（micro-electro-mechanical systems） devices such as micropumps and optical switches.All these devices exhibit an instability phenomenon known as pull-in instability,short circuit caused by pull-in with contact is destructive to micropump operation.To avoid pull-in instability caused by high driving voltage,pull-in voltage should be calculated accurately.1D lumped model,2D distributed model and 3D finite element model were proposed to simulate the deflection of micropump membrane subjected to nonlinear distributed electrostatic force.Hysteresis loop of micropump membrane,pull-in with contact and release were investigated comparatively by three models.Volume deformation of pump chamber,variation of pump membrane deflection and plate capacitance were also obtained.The 2D distributed model that is an ideally simplified model is more effective,pull-in voltage calculated by this model is in harmony with the results of 3D finite element model and macromodel,even when the membrane deformation is in the nonlinear elastic regime.The calculated pull-in voltage provides reference for setting the upper limit value of electrostatic micropump driving voltage.

关 键 词：微机电系统(micro-electro-mechanical system MEMS) 静电 微泵 吸合 释放 

分 类 号：TH323[机械工程—机械制造及自动化] TB125[理学—工程力学]