不同醇类对单晶硅绒面特性的影响  

Effects of Different Alcohols on Texture Properties of Monocrystalline Silicon

作　　者：屈盛 张兴旺[2] 毛和璜 余银祥 韩增华 汤叶华 周春兰[3] 王文静[3] 

机构地区：[1]欧贝黎新能源科技股份有限公司,南通226611 [2]中国科学院半导体研究所,北京100083 [3]中国科学院电工研究所,北京100190

出　　处：《材料导报》2011年第2期10-12,共3页Materials Reports

基　　金：江苏省科技基础设施建设计划项目(BM2009611);江苏省自然科学基金项目(BK2009620)

摘　　要：在单晶硅太阳电池的绒面制作过程中分别采用一元醇(乙醇、异丙醇)和二元醇(乙二醇、丙二醇)作为添加剂,比较它们对单晶硅绒面特性的影响。实验表明,一元醇可以降低化学反应速率,而二元醇可以加快反应速率,缩短制绒时间。二元醇相比一元醇具有更高的沸点,在制绒过程中挥发更少,可以减少药品的损耗,降低成本,然而二元醇的消泡效果比一元醇差,制绒时需要采用更大的初始浓度。扫描电子显微镜(SEM)结果表明,一元醇趋向于使绒面金字塔更均匀,而二元醇则容易导致绒面金字塔不均匀。反射谱的测试结果表明,采用二元醇作为添加剂进行制绒,相比一元醇,可以获得更低的硅片表面反射率。Monohydroxy alcohols（ethanol and isopropanol） and dihydroxy alcohols（ethanediol and propanediol） were used as additives during monocrystalline silicon wafers texturing, and their effects on texturing were investigated. Experimental results show that, monohydroxy alcohols（MA） reduce reactive rate, while dihydroxy alcohols（DA） increase reactive rate, resulting i^l reduced texturing time. And DA less volatilize due to their higher boiling point, re- sulting in reduced chemical consumption and lower cost, however, their abilities removing the hydrogen bubble away from silicon wafer surface are weaker than MA, therefore higher initial concentration are indispensable during texturing. Scanning electron microscopy（SEM） results indicate that MA trends to make pyramids more uniform, while DA leads to more non-uniform pyramids. Reflectivity measurements indicate that DA leads to lower wafer surface reflec- tivity than MA.

关 键 词：晶体硅太阳电池 制绒 一元醇 二元醇 

分 类 号：TQ225.24[化学工程—有机化工]