大直径内孔自动测量机构倾斜度测量研究  

Research on inclination measurement in large size pipe for automatic measuring machine

作　　者：王高文[1,2] 曲兴华[1] 邢书剑[1] 代雷[2] 

机构地区：[1]天津大学精密测试技术及仪器国家重点实验室,天津300072 [2]中国科学院长春光学精密机械与物理研究所应用光学国家重点实验室,长春130033

出　　处：《仪器仪表学报》2011年第1期63-68,共6页Chinese Journal of Scientific Instrument

基　　金：国家863项目(2008AA042410);国家自然科学基金(60723004)资助项目

摘　　要：为了实现对大直径内孔自动测量机构倾斜角度的连续、自动测量,建立了倾斜度测量系统。系统主要由半导体激光器、光学系统与位置敏感探测器(PSD)等元件组成,以激光光束和光学系统光轴分别表征被测机构的参考轴线与大直径内孔的轴线,同时PSD测量经过光学系统折射后激光光点的位置,由此测量两轴线构成的夹角,确定机构倾斜程度。论文分析了系统的测量误差,并进行了相关的实验,对测角误差进行校正,结果表明:系统的测角精度为±0.02°,分辨率为0.000 3°。系统稳定可靠,能够基本满足测量机构在大直径内孔中倾斜度测量的要求。In order to measure object inclination continuously and automatically in a few meters away in large pipe,an inclination measurement system was established.The system mainly consists of a semiconductor laser,a lens and a PSD module.The two axes of the measured mechanism and the pipe are represented by the laser beam and the optical axis respectively,and then the angle between the two axes is measured with the position of the spot detected by the PSD;as a result,the mechanism inclination can be evaluated.The measuring errors are analyzed in the paper,and the results of error calibration are also presented.Experiment results indicate that the inclination measurement system has an angle measurement accuracy of ±0.02° and resolution of 0.000 3°.The measuring system could basically meet the requirements of high reliability,stability and accuracy for the inclination measurement in large size pipe.

关 键 词：倾斜度测量 大直径内孔 位置敏感探测器 

分 类 号：TH712[机械工程—测试计量技术及仪器]