基于二维金属亚波长孔阵列结构的MEMS红外辐射源特性研究  

The Reseach of MEMS Infrared Radiation Source Characteristics Based on Two-Dimensional Metallic Sub-Wavelength Hole Arrays

作　　者：姚翔[1] 肖功利[2] 纪新明[1] 周嘉[1] 包宗明[1] 黄宜平[1] 

机构地区：[1]复旦大学微电子学系ASIC与系统国家重点实验室,上海200433 [2]桂林电子科技大学信息与通信学院,广西桂林541004

出　　处：《传感技术学报》2010年第11期1550-1554,共5页Chinese Journal of Sensors and Actuators

基　　金：国家自然科学基金资助项目(60906054);教育部博士研究生基金(20070246099)

摘　　要：以MEMS红外气敏传感器为应用目标,采用MEMS技术设计和制作一种二维金属亚波长孔阵列结构红外辐射源。探讨了不同厚度SU-8膜对金属/电介质/金属(M/D/M)二维金属亚波长孔阵列结构在中远红外波段透射特性的影响。设计并制作了Au/SU-8/Au的M/D/M结构,测试采用傅里叶变换红外光谱仪器。同时对M/D/M结构不同电介质层情况下的中远红外波段透射特性进行了模拟。实验结果表明,SU-8厚度在小于1μm时,透射强度远大于厚度1μm以上的结构,且有透射强度最大值出现(SU-8厚度为360nm),同时,随着SU-8厚度的增加,透射谱峰值呈现规律性红移。In this work,a novel tunable narrow-band infrared emitter based on two-dimensional metallic sub-wavelength hole arrays is reported and the relationship between the transmission spectrum of the emitter and the thickness of SU-8 layer of metal/dielectric/metal（M/D/M）structure in mid-infrared waveband has been studied.The emitter is structured by Au/SU-8/Au,in which the thickness of Au layer is 20 nm,and the SU-8 layer is between 0.2 to 1.2 micron.The transmission spectrum has been tested out with Varian 4 100 FT-IR.The experimental data have been compared and analyzed with simulation results from finite-difference time-domain（FDTD）calculation.It is found out that the structure with SU-8 layer thinner than 1 micron has much larger transmission peak strength than the ones with thicker SU-8 layer,with the largest transmission peak strength found when the thickness of SU-8 layer is 360 nm,and the red-shift of the wavelength of the transmission peak is also observed.

关 键 词：表面等离子体共振效应 二维金属亚波长孔阵列结构 SU-8膜的厚度 透射增强特性 

分 类 号：TP212.1[自动化与计算机技术—检测技术与自动化装置]